Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002611 | Chemical mechanical polishing pad having improved groove pattern | Yanghua He, Yaojian Leng | 2011-08-23 |
| 7871931 | Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same | Anthony DiCarlo, Yanghua He, James C. Baker, David A. Rothenbury | 2011-01-18 |