Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7899571 | Predictive method to improve within wafer CMP uniformity through optimized pad conditioning | Gul B. Basim, Serkan Kincal | 2011-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7899571 | Predictive method to improve within wafer CMP uniformity through optimized pad conditioning | Gul B. Basim, Serkan Kincal | 2011-03-01 |