Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043545 | Methods and apparatus to evenly clamp semiconductor substrates | Selvarajan Murugan | 2011-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043545 | Methods and apparatus to evenly clamp semiconductor substrates | Selvarajan Murugan | 2011-10-25 |