Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871830 | End point detection method for plasma etching of semiconductor wafers with low exposed area | Sumer Johal, Barton Lane, Sylvia Spruytte, Herve C. Kieffel | 2011-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871830 | End point detection method for plasma etching of semiconductor wafers with low exposed area | Sumer Johal, Barton Lane, Sylvia Spruytte, Herve C. Kieffel | 2011-01-18 |