Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927058 | Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port | Toshihiko Miyajima, Hidetoshi Horibe | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927058 | Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port | Toshihiko Miyajima, Hidetoshi Horibe | 2011-04-19 |