Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025555 | System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system | — | 2011-09-27 |
| 7913705 | Cleaning cup system for chemical mechanical planarization apparatus | — | 2011-03-29 |
| 7909910 | Vacuum line clean-out separator system | — | 2011-03-22 |
| 7901267 | Method for controlling the forces applied to a vacuum-assisted pad conditioning system | — | 2011-03-08 |