Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049213 | Feature dimension measurement | Ching-Chung Su, Yi-Wei Chiu, Tzu-Chan Weng, Yih-Song Chiu, Chih-Cherng Jeng +1 more | 2011-11-01 |
| 8000081 | Method and apparatus for safely dechucking wafers | Chung-Tsung Lu, Yu-Chih Liou | 2011-08-16 |
| 7995323 | Method and apparatus for securely dechucking wafers | Chung-Tsung Lu, Yu-Chih Liou | 2011-08-09 |
| 7973293 | Implantation quality improvement by xenon/hydrogen dilution gas | Yu LIN, Wei-Ming You, Ruey-Yong Deng, Jiunn-Nan Lin, Sheng-Chien Tung | 2011-07-05 |
| 7910014 | Method and system for improving wet chemical bath process stability and productivity in semiconductor manufacturing | Tai-Yung Yu, Yu-Sheng Su, Li-Te Hsu, Jin-Lin Liang, Shih-Cheng Yeh | 2011-03-22 |