Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048589 | Phase shift photomask performance assurance method | Yi-Ming Dai, Chien-Hsing Wu, Li-Kong Turn | 2011-11-01 |
| 7968258 | System and method for photolithography in semiconductor manufacturing | Wei-Yu Su, Yi-Ming Dai, Chun-Hung Kung | 2011-06-28 |