Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923265 | Method and system for improving critical dimension proximity control of patterns on a mask or wafer | Jen-His Chiu | 2011-04-12 |
| 7917244 | Method and system for reducing critical dimension side-to-side tilting error | Chai-Wei Chang | 2011-03-29 |