HI

Hikaru Ito

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #287,110 of 364,097Top 80%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7947215 Heat treatment apparatus, heat treatment method, and recording medium storing computer program carrying out the same Shinji Okada, Masami Yamashita 2011-05-24