Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919005 | Dry etching method, fine structure formation method, mold and mold fabrication method | Hideo Nakagawa, Masaru Sasago | 2011-04-05 |
| 7906030 | Dry etching method, fine structure formation method, mold and mold fabrication method | Hideo Nakagawa, Masaru Sasago | 2011-03-15 |