Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960489 | Interlayer insulating film, method for forming the same and polymer compositon | — | 2011-06-14 |
| 7947338 | Method of forming an interlayer insulating film having a siloxane skeleton | — | 2011-05-24 |
| 7947375 | Interlayer dielectric film | — | 2011-05-24 |
| 7893535 | Semiconductor device and method for fabricating the same | Atsushi Ikeda, Hideo Nakagawa | 2011-02-22 |