Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7946247 | Coating layer thickness measurement mechanism and coating layer forming apparatus using the same | Hideaki Awata, Kentaro Yoshida | 2011-05-24 |
| 7871667 | Method of operating vacuum deposition apparatus and vacuum deposition apparatus | Hideaki Awata, Kentaro Yoshida | 2011-01-18 |