Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8016982 | Sputtering apparatus and sputtering method | Masahiro Yamamoto, Takeshi Koiwasaki, Hitoshi Yamanishi | 2011-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8016982 | Sputtering apparatus and sputtering method | Masahiro Yamamoto, Takeshi Koiwasaki, Hitoshi Yamanishi | 2011-09-13 |