Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892862 | Method of evaluating thermal treatment and method of manufacturing semiconductor wafer | Takafumi Yamashita | 2011-02-22 |
| 7888265 | Method for assaying copper in silicon wafers | Katsuya Hirano | 2011-02-15 |