Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021484 | Method of manufacturing epitaxial silicon wafer and apparatus therefor | Kazuhiro Narahara, Hirotaka Kato | 2011-09-20 |
| 7993452 | Method of manufacturing epitaxial silicon wafer | Kazuhiro Narahara, Hirotaka Kato | 2011-08-09 |