Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012365 | Deep anisotropic silicon etch method | Remi Dussart, Philippe Lefaucheux, Xavier Mellhaoui, Lawrence J. Overzet, Thomas Tillocher +1 more | 2011-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012365 | Deep anisotropic silicon etch method | Remi Dussart, Philippe Lefaucheux, Xavier Mellhaoui, Lawrence J. Overzet, Thomas Tillocher +1 more | 2011-09-06 |