Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7942974 | Method of cleaning a film-forming apparatus | Naoki Tamaoki, Yuusuke Sato, Jun Sonobe, Takamitsu Shigemoto | 2011-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7942974 | Method of cleaning a film-forming apparatus | Naoki Tamaoki, Yuusuke Sato, Jun Sonobe, Takamitsu Shigemoto | 2011-05-17 |