Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892984 | Reduction of defects formed on the surface of a silicon oxynitride film | — | 2011-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892984 | Reduction of defects formed on the surface of a silicon oxynitride film | — | 2011-02-22 |