Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981803 | Method of forming micro pattern of semiconductor device | — | 2011-07-19 |
| 7955985 | Method of forming micro pattern of semiconductor device | Yong Chul Shin | 2011-06-07 |
| 7943053 | Method of forming a micro pattern in semiconductor device | — | 2011-05-17 |
| 7943498 | Method of forming micro pattern in semiconductor device | — | 2011-05-17 |
| 7892977 | Hard mask patterns of a semiconductor device and a method for forming the same | — | 2011-02-22 |
| 7892981 | Method of forming a micro pattern of a semiconductor device | — | 2011-02-22 |
| 7879729 | Method of forming a micro pattern of a semiconductor device | — | 2011-02-01 |