Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029949 | Photomask for forming contact hole in semiconductor device | Dong Sook Chang | 2011-10-04 |
| 7993814 | Method for forming patterns using single mask | — | 2011-08-09 |
| 7932998 | Exposure apparatus having the same ID bias | — | 2011-04-26 |