Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080472 | Metal line having a MoxSiy/Mo diffusion barrier of semiconductor device and method for forming the same | Joon Seok Oh, Seung-Jin Yeom, Baek Mann Kim, Nam-Yeal Lee, Jae Hong Kim | 2011-12-20 |
| 8053895 | Metal line of semiconductor device having a multilayer molybdenum diffusion barrier and method for forming the same | Seung-Jin Yeom, Baek Mann Kim, Nam-Yeal Lee | 2011-11-08 |
| 8043962 | Metal wire for a semiconductor device formed with a metal layer without voids therein and a method for forming the same | Baek Mann Kim, Soo Hyun Kim, Young Jin Lee, Sun Woo Hwang, Jeong-Tae Kim | 2011-10-25 |
| 8008708 | Metal line of semiconductor device having a diffusion barrier and method for forming the same | Nam-Yeal Lee, Seung-Jin Yeom, Baek Mann Kim, Joon Seok Oh | 2011-08-30 |
| 8008774 | Multi-layer metal wiring of semiconductor device preventing mutual metal diffusion between metal wirings and method for forming the same | Soo Hyun Kim, Baek Mann Kim, Young Jin Lee, Jeong-Tae Kim | 2011-08-30 |
| 7977793 | Metal line of semiconductor device having a diffusion barrier with an amorphous TaBN layer and method for forming the same | Seung-Jin Yeom, Baek Mann Kim, Young Jin Lee, Jeong-Tae Kim | 2011-07-12 |
| 7902065 | Multi-layered metal line having an improved diffusion barrier of a semiconductor device and method for forming the same | Baek Mann Kim, Seung-Jin Yeom, Young Jin Lee, Jeong-Tae Kim | 2011-03-08 |
| 7875978 | Metal line having a multi-layered diffusion layer in a semiconductor device and method for forming the same | Seung-Jin Yeom, Baek Mann Kim, Joon Seok Oh, Nam-Yeal Lee | 2011-01-25 |
| 7875979 | Metal line of semiconductor device having a diffusion barrier including CRxBy and method for forming the same | Seung-Jin Yeom, Baek Mann Kim, Young Jin Lee, Jeong-Tae Kim | 2011-01-25 |
| 7872351 | Multi-layered metal line of semiconductor device for preventing diffusion between metal lines and method for forming the same | Jeong-Tae Kim, Baek Mann Kim, Soo Hyun Kim, Young Jin Lee | 2011-01-18 |