Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003540 | Method for manufacturing semiconductor device | — | 2011-08-23 |
| 7989145 | Method for forming fine pattern of semiconductor device | Ki Lyoung Lee | 2011-08-02 |
| 7972766 | Method for forming fine pattern of semiconductor device | — | 2011-07-05 |
| 7910291 | Method for manufacturing semiconductor device using immersion lithography process | Hyun Sook Jun, Tae Seung Eom | 2011-03-22 |