Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062494 | Micro-machining dust removing device, micro-machining apparatus, and micro-machining dust removing method | Futoshi Iwata, Masatoshi Yasutake, Takuya Nakaue, Syuichi Kikuchi | 2011-11-22 |
| 7927769 | Method for fabricating EUVL mask | Ryoji Hagiwara, Tomokazu Kozakai | 2011-04-19 |