Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039062 | Methods of atomic layer deposition using hafnium and zirconium-based precursors | Peter Nicholas Heys, Andrew Kingsley, Fuquan Song, Paul M. Williams, Thomas Leese +1 more | 2011-10-18 |