Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023246 | Electrostatic chuck and method of manufacturing the same | Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023246 | Electrostatic chuck and method of manufacturing the same | Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe | 2011-09-20 |