Issued Patents 2011
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030176 | Method for preparing substrate having monocrystalline film | Makoto Kawai, Kouichi Tanaka, Yuji Tobisaka, Shoji Akiyama, Yoshihiro Nojima | 2011-10-04 |
| 8030118 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka | 2011-10-04 |
| 8021910 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka | 2011-09-20 |
| 7977209 | Method for manufacturing SOI substrate | Shoji Akiyama, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-07-12 |
| 7972937 | Method for producing semiconductor substrate | Shoji Akiyama, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-07-05 |
| 7951513 | Pellicle and method for producing pellicle | Shoji Akiyama, Toshihiko Shindo | 2011-05-31 |
| 7952054 | Heating element | Noboru Kimura, Waichi Yamamura, Shoji Kano | 2011-05-31 |
| 7935611 | Method for manufacturing substrate for photoelectric conversion element | Shoji Akiyama, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-05-03 |
| 7923835 | Package, electronic device, substrate having a separation region and a wiring layers, and method for manufacturing | Shirou Youda, Kazuto Tsuji | 2011-04-12 |
| 7919217 | Pellicle and method for producing pellicle | Shoji Akiyama, Toshihiko Shindo | 2011-04-05 |
| 7901846 | Pellicle and method for manufacturing the same | Shoji Akiyama, Toshihiko Shindoo | 2011-03-08 |
| 7892934 | SOI substrate and method for manufacturing SOI substrate | Makoto Kawai, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka, Shoji Akiyama | 2011-02-22 |
| 7879175 | Method for manufacturing pyrolytic boron nitride composite substrate | Makoto Kawai, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka, Shoji Akiyama | 2011-02-01 |