Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029974 | Metal oxide-containing film-forming composition, metal oxide-containing film-formed substrate, and patterning process | Takafumi Ueda, Toshiharu Yano | 2011-10-04 |
| 8026038 | Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method | Takafumi Ueda, Toshiharu Yano, Mutsuo Nakashima | 2011-09-27 |
| 7910283 | Silicon-containing antireflective coating forming composition, silicon-containing antireflective coating, substrate processing intermediate, and substrate processing method | Motoaki Iwabuchi, Takeshi Asano, Takafumi Ueda | 2011-03-22 |
| 7875417 | Silicone-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method | Toshiharu Yano, Koji Hasegawa | 2011-01-25 |
| 7868407 | Substrate comprising a lower silicone resin film and an upper silicone resin film | Takafumi Ueda | 2011-01-11 |