TS

Toru Shirasaki

SC Shin-Etsu Chemical Co.: 3 patents #34 of 218Top 20%
Overall (2011): #33,406 of 364,097Top 10%
3
Patents 2011

Issued Patents 2011

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
7968252 Pellicle frame 2011-06-28
7914952 Lithographic pellicle 2011-03-29
7901841 Pellicle for photolithography 2011-03-08