Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7954340 | Synthetic quartz glass substrate for excimer lasers and making method | Kazuo Shirota, Osamu Sekizawa | 2011-06-07 |
| 7935648 | Titania-doped quartz glass for nanoimprint molds | Shigeru Maida | 2011-05-03 |
| 7923394 | Titania-doped quartz glass for nanoimprint molds | Shigeru Maida | 2011-04-12 |