Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7979166 | Generation facility management system | Kazuo Yamada, Nobuhiro Fuke, Takashi Fukushima | 2011-07-12 |
| 7927455 | Plasma processing apparatus | Yuhsuke Hukuoka | 2011-04-19 |
| 7918939 | Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same | Yusuke Fukuoka | 2011-04-05 |