Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8046193 | Determining process condition in substrate processing module | Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, John B. Pieper | 2011-10-25 |
| 8033190 | Process condition sensing wafer and data analysis system | Mei Sun | 2011-10-11 |