Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8044668 | Method and system for calibrating measurement tools for semiconductor device manufacturing | Yu-Chu Chen | 2011-10-25 |
| 7989228 | Method and structure for sample preparation for scanning electron microscopes in integrated circuit manufacturing | Xudong Wan, Liqi Guo | 2011-08-02 |