Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030169 | SOI substrate and manufacturing method thereof | Tetsuya Kakehata, Hideto Ohnuma, Kenichiro Makino | 2011-10-04 |
| 8022380 | Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same | Koichiro Tanaka | 2011-09-20 |
| 7929154 | Laser irradiation apparatus and laser irradiation method and method for manufacturing semiconductor device | Koichiro Tanaka | 2011-04-19 |