MI

Mika Ishiwata

SL Semiconductor Energy Laboratory: 1 patents #242 of 359Top 70%
Overall (2011): #214,777 of 364,097Top 60%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8053338 Plasma CVD apparatus Shunpei Yamazaki, Toru Takayama, Mitsunori Sakama, Hisashi Abe, Hiroshi Uehara 2011-11-08