Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045271 | Laser irradiation method and laser irradiation apparatus | Koichiro Tanaka | 2011-10-25 |
| 8000016 | Laser irradiation apparatus and manufacturing method of semiconductor device | Koichiro Tanaka | 2011-08-16 |
| 7940441 | Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method | Koichiro Tanaka | 2011-05-10 |
| 7916987 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2011-03-29 |