Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960200 | Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS | Guillaume Bouche | 2011-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960200 | Orientation-dependent etching of deposited AlN for structural use and sacrificial layers in MEMS | Guillaume Bouche | 2011-06-14 |