Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007634 | Wafer spin chuck and an etcher using the same | Woo Young Kim, Woo-Seok Lee | 2011-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007634 | Wafer spin chuck and an etcher using the same | Woo Young Kim, Woo-Seok Lee | 2011-08-30 |