Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8063721 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2011-11-22 |
| 8026120 | Method of manufacturing MEMS device | Ryuji Kihara | 2011-09-27 |
| 8018302 | Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof | Akira Sato | 2011-09-13 |
| 7994594 | Electronic device, resonator, oscillator and method for manufacturing electronic device | Akira Sato | 2011-08-09 |
| 7989905 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-08-02 |
| 7956709 | MEMS switch and manufacturing method thereof | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-06-07 |
| 7892875 | MEMS resonator and manufacturing method of the same | Akira Sato, Toru Watanabe, Takeshi Mori | 2011-02-22 |
| 7884431 | MEMS device having a movable electrode | Toru Watanabe, Akira Sato, Takeshi Mori | 2011-02-08 |
| 7880245 | Electronic device and method for manufacturing thereof | Akira Sato, Toru Watanabe, Takeshi Mori | 2011-02-01 |