Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7905979 | Method for holding substrate in vacuum | Naoto Yokoyama, Mitsuaki Morimoto, Makoto Nakahara, Akira Hirai, Satoshi Yawata | 2011-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7905979 | Method for holding substrate in vacuum | Naoto Yokoyama, Mitsuaki Morimoto, Makoto Nakahara, Akira Hirai, Satoshi Yawata | 2011-03-15 |