Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041198 | Heat treatment apparatus and method for heating substrate by photo-irradiation | Hiroki Kiyama | 2011-10-18 |
| 7965927 | Heat treatment apparatus and heat treatment method | Jun Watanabe | 2011-06-21 |