Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947337 | Method and apparatus for plasma enhanced chemical vapor deposition | Thomas Kuepper, Lars Bewig, Christoph Moelle, Thomas Niklos | 2011-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947337 | Method and apparatus for plasma enhanced chemical vapor deposition | Thomas Kuepper, Lars Bewig, Christoph Moelle, Thomas Niklos | 2011-05-24 |