Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989299 | Semiconductor device, method of manufacturing the same, and method of evaluating semiconductor device | Hidenobu Fukutome | 2011-08-02 |
| 7927892 | Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device | — | 2011-04-19 |