Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985674 | SiH4 soak for low hydrogen SiN deposition to improve flash memory device performance | Sung Jin Kim, Alexander H. Nickel, Minh Van Ngo, Hieu Pham, Shinich Imada | 2011-07-26 |