Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8005562 | Process-parameter prognostic system for predicting shape of semiconductor structure, semiconductor fabrication apparatus having the system, and method of using the apparatus | Kye Hyun Baek, Yong Jin Kim | 2011-08-23 |