Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048595 | Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask | Ilyong Jang, SangGyun Woo | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048595 | Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask | Ilyong Jang, SangGyun Woo | 2011-11-01 |