Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7868488 | Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus | — | 2011-01-11 |
SL
Seok-Kyun Lee
Overall (2011): #170,450 of 364,097Top 50%
1
Patents 2011