Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039772 | Microwave resonance plasma generating apparatus and plasma processing system having the same | Young Dong LEE, Igor Kossyi, Merab Ivanovich Taktakishvili | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039772 | Microwave resonance plasma generating apparatus and plasma processing system having the same | Young Dong LEE, Igor Kossyi, Merab Ivanovich Taktakishvili | 2011-10-18 |