Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976898 | Atomic layer deposition apparatus | Dae Youn Kim, Hyung Sang Park, Sang Jin Jeong, Wonyong Koh, Herbert Terhorst | 2011-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976898 | Atomic layer deposition apparatus | Dae Youn Kim, Hyung Sang Park, Sang Jin Jeong, Wonyong Koh, Herbert Terhorst | 2011-07-12 |