Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052853 | Sputtering apparatus and method of preventing damage thereof | Jinhee Yun, Munik Na, Seunglyul Lee, Kyoungshik Kim, Sanghyo Park +3 more | 2011-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052853 | Sputtering apparatus and method of preventing damage thereof | Jinhee Yun, Munik Na, Seunglyul Lee, Kyoungshik Kim, Sanghyo Park +3 more | 2011-11-08 |